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For the Inventor, By the Inventor

Fremont, CA, United States of America

Mattson Technology, Inc


USPTO Granted Patents = 278



Trademarks = 11

Forward Citations = 4,647

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236 inventors (with patents filed for the assignee):

goldMedal Michael Xiaoxuan Yang (52 out of 151 patents)

silverMedal Paul Janis Timans (39 out of 40 patents)

bronzeMedal Stephen E Savas (32 out of 61 patents)

4.  Hua Chung (28 out of 141 patents)

5.  Shawming Ma (25 out of 47 patents)

6.  Xinliang Lu (23 out of 62 patents)

7.  Rolf Bremensdorfer (21 out of 22 patents)

8.  Joseph Cibere (19 out of 20 patents)

9.  Maolin Long (15 out of 67 patents)

10.  Daniel J Devine (14 out of 15 patents)

11.  Martin L Zucker (13 out of 13 patents)

12.  Qi Zhang (13 out of 22 patents)

13.  Kristian E Johnsgard (13 out of 15 patents)

14.  Dieter Hezler (13 out of 13 patents)

15.  Ryan M Pakulski (11 out of 11 patents)


Core Competencies:
Plasma Processing
Thermal Processing
Inductively Coupled Plasma
Temperature Measurement
Rapid Thermal Processing
Electrostatic Chuck
Gas Showerhead Assembly
Workpiece Processing
Hybrid Plasma Source
Pressure Control System
Atomic Layer Etch
Defluorination Process

278 patents:

1. 12476151 - Preheat processes for millisecond anneal system (2025-11-18),
2. 12476077 - Induction coil assembly for plasma processing apparatus (2025-11-18),
3. 12442078 - Workpiece processing apparatus with gas showerhead assembly (2025-10-14),
4. 12417900 - Plasma processing apparatus (2025-09-16),
5. 12412758 - Workpiece processing apparatus with thermal processing systems (2025-09-09),
6. 12400916 - Transmission-based temperature measurement of a workpiece in a thermal processing system (2025-08-26),
7. 12400831 - Dual frequency matching circuit for inductively coupled plasma (ICP) loads (2025-08-26),
8. 12399064 - Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures (2025-08-26),
9. 12362194 - Rapid thermal processing system with cooling system (2025-07-15),
10. 12352306 - Workpiece support for a thermal processing system (2025-07-08),
11. 12347677 - Enhanced ignition in inductively coupled plasmas for workpiece processing (2025-07-01),
12. 12347661 - Pressure control system for a multi-head processing chamber of a plasma processing apparatus (2025-07-01),
13. 12340981 - Workpiece processing apparatus with outer gas channel insert (2025-06-24),
14. 12334312 - Configurable faraday shield (2025-06-17),
15. 12308209 - Workpiece processing apparatus with plasma and thermal processing systems (2025-05-20),
Mattson Technology, Inc. is a leading supplier of dry strip equipment and thermal processing systems used in the manufacturing of semiconductors. With over 35 years of experience, they provide innovative solutions that enable their customers to produce high-performance devices in a cost-effective manner. Mattson's technology solutions are trusted by semiconductor manufacturers worldwide.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 30 2025

278 Patents

#6 in Fremont, CA

#331 in California

#1,500 in US

#3,078 in the World

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Fremont, CA, United States of America

Mattson Technology, Inc

Forward Citations = 4,647

236 inventors:

goldMedal Michael Xiaoxuan Yang (52 out of 151 patents)

silverMedal Paul Janis Timans (39 out of 40 patents)

bronzeMedal Stephen E Savas (32 out of 61 patents)

4.  Hua Chung (28 out of 141 patents)

5.  Shawming Ma (25 out of 47 patents)

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