For the Inventor, By the Inventor

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Fremont, CA, United States of America

Mattson Technology, Inc

USPTO Granted Patents = 285

% Expired Patents = 9.1

EPO Patents = 7

Trademarks = 7

Forward Citations = 4,833

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241 inventors (with patents filed for the assignee):

Michael Xiaoxuan Yang (55 out of 155 patents)

Paul Janis Timans (39 out of 40 patents)

Stephen E Savas (33 out of 62 patents)

4. Hua Chung (28 out of 142 patents)

5. Shawming Ma (26 out of 48 patents)

6. Rolf Bremensdorfer (24 out of 25 patents)

7. Xinliang Lu (23 out of 62 patents)

8. Joseph Cibere (20 out of 21 patents)

9. Maolin Long (18 out of 71 patents)

10. Daniel J Devine (14 out of 15 patents)

11. Dieter Hezler (14 out of 14 patents)

12. Martin L Zucker (13 out of 13 patents)

13. Qi Zhang (13 out of 23 patents)

14. Kristian E Johnsgard (13 out of 15 patents)

15. Ryan M Pakulski (11 out of 11 patents)

Core Competencies:

Plasma Processing

Thermal Systems

Workpiece Treatment

Inductively Coupled Plasma

Rapid Thermal Processing

Temperature Measurement

Etch Processes

Gas Flow Control

Electrostatic Chuck

Anneal Systems

Focus Ring Adjustment

Reactive Species

285 patents: Sort by Forward Citations

1. 12733445 - Electrostatic chuck assembly for plasma processing apparatus (2026-09-08),

2. 12692568 - Thermal processing of closed shape workpieces (2026-07-28),

3. 12635451 - Support plate for localized heating in thermal processing systems (2026-05-19),

4. 12603256 - Conductive member for cleaning focus ring of a plasma processing apparatus (2026-04-14),

5. 12580157 - Grid assembly for plasma processing apparatus (2026-03-17),

6. 12562342 - Variable mode plasma chamber utilizing tunable plasma potential (2026-02-24),

7. 12535273 - Workpiece processing apparatus with thermal processing systems (2026-01-27),

8. 12476151 - Preheat processes for millisecond anneal system (2025-11-18),

9. 12476077 - Induction coil assembly for plasma processing apparatus (2025-11-18),

10. 12442078 - Workpiece processing apparatus with gas showerhead assembly (2025-10-14),

11. 12417900 - Plasma processing apparatus (2025-09-16),

12. 12412758 - Workpiece processing apparatus with thermal processing systems (2025-09-09),

13. 12400916 - Transmission-based temperature measurement of a workpiece in a thermal processing system (2025-08-26),

14. 12400831 - Dual frequency matching circuit for inductively coupled plasma (ICP) loads (2025-08-26),

15. 12399064 - Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures (2025-08-26),

Mattson Technology, Inc. is a leading provider of advanced plasma processing equipment, specializing in technologies essential for semiconductor manufacturing. Headquartered in Fremont, California, the company focuses on innovative solutions in plasma processing, thermal systems, and workpiece treatment. Its expertise encompasses inductively coupled plasma, rapid thermal processing, and precise temperature measurement, enabling efficient etch processes and effective gas flow control. Mattson's technologies play a critical role in enhancing the performance and reliability of semiconductor devices.

Profile summary based on public USPTO records.

Company Badge

USPTO Data Jan 1 1976 - Sep 29 2026

285 Patents

#9 in Fremont, CA

#324 in California

#1,534 in US

#3,104 in the World

Fremont, CA, United States of America

Mattson Technology, Inc

Forward Citations = 4,833

241 inventors:

Michael Xiaoxuan Yang (55 out of 155 patents)

Paul Janis Timans (39 out of 40 patents)

Stephen E Savas (33 out of 62 patents)

4. Hua Chung (28 out of 142 patents)

5. Shawming Ma (26 out of 48 patents)

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