This inventor holds 62 USPTO granted patents and 8 published patent applications and 4 EPO patents, primarily in Plasma Processing. Top assignees: Mattson Technology, Inc, Beijing E-Town Semiconductor Technology, Co., Ltd, Comet Technologies USA, Inc.. Active years: 1992-2026.
Location History:
- Newark, CA (US) (1992 - 1996)
- Alameda, CA (US) (1998 - 2003)
- Taoyuan, TW (2004)
- Chungli, Taoyuan, TW (2002 - 2005)
- Fremont, CA (US) (2004 - 2019)
- San Jose, CA (US) (1993 - 2024)
- Pleasanton, CA (US) (2014 - 2024)
Company Filing History:
33 out of 285Â 
8 out of 116Â 
8 out of 36Â 
Years Active: 1992-2026
Areas of Expertise:
Sure, I will write an article about inventor Stephen E Savas based on the provided data.
Title: Innovator Spotlight: Stephen E Savas
Introduction:
Stephen E Savas, an innovative inventor in the field of plasma processing technologies, hails from San Jose, CA (US). With a total of 29 patents to his name, Savas has made significant contributions to the industry through his groundbreaking inventions.
Latest Patents:
Among his latest patents is the 'Plasma Non-Uniformity Detection' method, which focuses on detecting non-uniformities in plasma in a radio frequency plasma processing system. This invention involves generating a plasma within a reaction chamber and utilizing sensors to detect electrical signals, thereby identifying plasma non-uniformities.
Another notable patent is the 'Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential' apparatus. This innovation features a plasma chamber, a dielectric window, an inductive coupling element, and a processing chamber with a workpiece support. The design incorporates an electrostatic shield grounded via a tunable reactive impedance circuit to maintain plasma stability during processing.
Career Highlights:
Stephen E Savas has garnered experience and expertise through his tenure at companies like Mattson Technology, Inc., and Comet Technologies USA, Inc. His innovative spirit and problem-solving approach have led to advancements in plasma processing technologies, making him a respected figure in the industry.
Collaborations:
Throughout his career, Savas has collaborated with industry experts such as Brad S Mattson and Alexandre De Chambrier. These collaborations have played a pivotal role in the development and commercialization of his patented inventions, showcasing his ability to work effectively in multidisciplinary teams.
Conclusion:
In conclusion, Stephen E Savas stands out as a visionary inventor with a strong track record of patenting cutting-edge technologies in the field of plasma processing. His contributions have not only advanced the industry but also inspired future generations of innovators to push the boundaries of scientific discovery.