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Beijing E-town Semiconductor Technology, Co., Ltd

USPTO Granted Patents = 116

EPO Patents = 3

Forward Citations = 66

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77 inventors (with patents filed for the assignee):

Michael Xiaoxuan Yang (47 out of 151 patents)

Hua Chung (25 out of 141 patents)

Shawming Ma (23 out of 47 patents)

4. Rolf Bremensdorfer (21 out of 22 patents)

5. Xinliang Lu (20 out of 62 patents)

6. Maolin Long (15 out of 66 patents)

7. Qi Zhang (12 out of 22 patents)

8. Dieter Hezler (12 out of 13 patents)

9. Joseph Cibere (11 out of 20 patents)

10. Ting Xie (9 out of 10 patents)

11. Markus Lieberer (9 out of 9 patents)

12. Ryan M Pakulski (7 out of 11 patents)

13. Christian Pfahler (7 out of 7 patents)

14. Stephen E Savas (7 out of 60 patents)

15. Haichun Yang (7 out of 15 patents)

Core Competencies:

Plasma Processing

Thermal Processing

Inductively Coupled Plasma

Rapid Thermal Processing

Electrostatic Chuck

Gas Showerhead Assembly

Temperature Measurement

Workpiece Processing

Dual Frequency Matching Circuit

Hybrid Plasma Source

Anneal System

Selective Etch Process

116 patents: Sort by Forward Citations

1. 12476151 - Preheat processes for millisecond anneal system (2025-11-18),

2. 12476077 - Induction coil assembly for plasma processing apparatus (2025-11-18),

3. 12442078 - Workpiece processing apparatus with gas showerhead assembly (2025-10-14),

4. 12417900 - Plasma processing apparatus (2025-09-16),

5. 12412758 - Workpiece processing apparatus with thermal processing systems (2025-09-09),

6. 12400916 - Transmission-based temperature measurement of a workpiece in a thermal processing system (2025-08-26),

7. 12400831 - Dual frequency matching circuit for inductively coupled plasma (ICP) loads (2025-08-26),

8. 12399064 - Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures (2025-08-26),

9. 12362194 - Rapid thermal processing system with cooling system (2025-07-15),

10. 12352306 - Workpiece support for a thermal processing system (2025-07-08),

11. 12347677 - Enhanced ignition in inductively coupled plasmas for workpiece processing (2025-07-01),

12. 12347661 - Pressure control system for a multi-head processing chamber of a plasma processing apparatus (2025-07-01),

13. 12340981 - Workpiece processing apparatus with outer gas channel insert (2025-06-24),

14. 12334312 - Configurable faraday shield (2025-06-17),

15. 12308209 - Workpiece processing apparatus with plasma and thermal processing systems (2025-05-20),

Beijing E-Town Semiconductor Technology Co., Ltd. is a leading semiconductor company based in Beijing, China. Established in 2014, the company specializes in the design, development, and manufacture of advanced semiconductor products. E-Town Semiconductor has a strong focus on research and development, and is dedicated to providing customers with innovative solutions for various industries including telecommunications, consumer electronics, automotive, and more. With cutting-edge technology and a commitment to quality, E-Town Semiconductor aims to be a global leader in the semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

116 Patents

#49 in Beijing

#269 in China

#6,638 in the World

Beijing E-town Semiconductor Technology, Co., Ltd

Forward Citations = 66

77 inventors:

Michael Xiaoxuan Yang (47 out of 151 patents)

Hua Chung (25 out of 141 patents)

Shawming Ma (23 out of 47 patents)

4. Rolf Bremensdorfer (21 out of 22 patents)

5. Xinliang Lu (20 out of 62 patents)

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