This inventor holds 48 USPTO granted patents and 18 published patent applications and 3 EPO patents, primarily in Plasma Processing. Top assignees: Mattson Technology, Inc, Beijing E-Town Semiconductor Technology, Co., Ltd, Applied Materials, Inc.. Active years: 1999-2026.
IDiyas Innovation Intelligence. (2026). Inventor Profile: Shawming Ma. Retrieved from https://idiyas.com/inventor/shawming-ma
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
USPTO Granted Patents = 48 (Patent Applications = 18)
% Patents Active = 81.3
EPO Patents = 3 (Patent Applications = 4)
Average Co-Inventor Count = 2.3
ph-index = 13
Forward Citations = 582(Granted Patents)
Location History:
- Palo Alto, CA (US) (2023)
- Sunnyvale, CA (US) (1999 - 2024)
Company Filing History:
26 out of 286 Mattson Technology, Inc
24 out of 116 Beijing E-Town Semiconductor Technology, Co., Ltd
9 out of 14,482 
Applied Materials, Inc.
4. 4 out of 4,738
Agilent Technologies, Inc.
5. 4 out of 9,639
Hewlett-Packard Company
6. 1 out of 1
Agilent Technologies Texas Instruments Incorporated
7. 1 out of 1
Beijing E-Town Semiconductor Co, , Ltd.
8. 1 out of 29,901
Texas Instruments Corporation
9. 3 out of 834,570 patents
Other
where one patent can have more than one assignee
Years Active: 1999-2026
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Areas of Expertise:
Plasma Processing
Atomic Layer Etch
Thermal Treatment
Inductively Coupled Plasma
Focus Ring Adjustment
High Aspect Ratio Structures
Plasma Charging Damage
Ferroelectric Capacitor
Vaporized Solvents
Sulfur-Based Etchants
Carbon Hardmask Removal
Workpiece Processing
48 patents (USPTO):Explore Patents
2. 12347677 - Enhanced ignition in inductively coupled plasmas for workpiece processing (2025-07-01),
6. 11848204 - Enhanced ignition in inductively coupled plasmas for workpiece processing (2023-12-19),
As a specialist in innovations, inventions, inventors, patent attorneys, assignees, and patents, I focus solely on topics related to these areas.
Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
18 patents pending:
IDiyas Innovation Intelligence. (2026). Inventor Profile: Shawming Ma. Retrieved from https://idiyas.com/inventor/shawming-ma
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
3 patents (EPO):
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
4 patents pending (EPO):
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]