San Jose, CA, United States of America

Yao Zhi Hu



Average Co-Inventor Count = 3.4

ph-index = 9

Forward Citations = 744(Granted Patents)


Company Filing History:


Years Active: 2000-2017

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14 patents (USPTO):

Title: The Innovative Contributions of Yao Zhi Hu

Introduction

Yao Zhi Hu is a prominent inventor based in San Jose, California, known for his significant contributions to the field of thermal processing technology. With a total of 14 patents to his name, he has made remarkable advancements that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Yao Zhi Hu's latest patents is the "Selective Reflectivity Process Chamber with Customized Wavelength Response and Method." This invention describes a customizable chamber spectral response that can be utilized to optimize chamber performance for various applications, including wafer heating, cooling, temperature measurement, and stray light management. The system is designed to process a treatment object with a specific emission spectrum, allowing the chamber to respond differently to heating arrangement radiated energy and treatment object radiated energy. This innovative approach enables the chamber to reflect the majority of the heat source radiated energy while absorbing the treatment object radiated energy, thus enhancing overall performance. Another notable patent is the "Method and System for Thermally Processing a Plurality of Wafer-Shaped Objects." This invention outlines a process for efficiently processing multiple semiconductor wafers within a thermal processing chamber, utilizing a face-to-face or back-to-back configuration to optimize heating.

Career Highlights

Throughout his career, Yao Zhi Hu has worked with several notable companies, including Mattson Technology, Inc. and Steag RTP Systems GmbH. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in thermal processing technologies.

Collaborations

Yao Zhi Hu has collaborated with several professionals in his field, including Sing Pin Tay and Sing-Pin Tay. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Yao Zhi Hu's contributions to the field of thermal processing technology are significant and impactful. His innovative patents and collaborative efforts continue to shape the future of semiconductor manufacturing.

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