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San Jose, CA, United States of America

Steag Rtp Systems Gmbh

USPTO Granted Patents = 31

% Expired Patents = 6.5

Forward Citations = 1,289

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44 inventors (with patents filed for the assignee):

Randhir P S Thakur (5 out of 143 patents)

Wilfried Lerch (4 out of 13 patents)

Yao Zhi Hu (4 out of 14 patents)

4. Sing Pin Tay (4 out of 6 patents)

5. Markus Hauf (3 out of 62 patents)

6. Julio L Guardado (3 out of 4 patents)

7. Robert J Champetier (3 out of 5 patents)

8. Dieter Zernickel (2 out of 6 patents)

9. Patrick Schmid (2 out of 5 patents)

10. Zsolt Nenyei (2 out of 14 patents)

11. Heinrich Walk (2 out of 9 patents)

12. Helmut Sommer (2 out of 5 patents)

13. Uwe Kreiser (2 out of 2 patents)

14. Werner Blersch (2 out of 4 patents)

15. Helmut Aschner (2 out of 4 patents)

Core Competencies:

Thermal Treatment

Substrates

Temperature Measurement

Rapid Thermal Processing

Semiconductor Devices

Dielectric Layers

Heating Elements

UV Support

Calibration

Gas Leaks

Reflective Substrates

Thin Films

31 patents: Sort by Forward Citations

1. 7041610 - Method and apparatus for the thermal treatment of substrates (2006-05-09),

2. 7004716 - Device and method for aligning disk-shaped substrates (2006-02-28),

3. 6953338 - Device for thermal treatment of substrates (2005-10-11),

4. 6847012 - Apparatus and method for measuring the temperature of substrates (2005-01-25),

5. 6830631 - Method for the removing of adsorbed molecules from a chamber (2004-12-14),

6. 6752625 - Method and apparatus device for the heat treatment of substrates (2004-06-22),

7. 6737367 - UV-supported thermal treatment of compound semiconductors in RTP systems (2004-05-18),

8. 6614005 - Device and method for thermally treating substrates (2003-09-02),

9. 6561694 - Method and device for calibrating measurements of temperatures independent of emissivity (2003-05-13),

10. 6514876 - Pre-metal dielectric rapid thermal processing for sub-micron technology (2003-02-04),

11. 6359263 - System for controlling the temperature of a reflective substrate during rapid heating (2002-03-19),

12. 6316747 - Apparatus for the thermal treatment of substrates (2001-11-13),

13. 6293696 - System and process for calibrating pyrometers in thermal processing chambers (2001-09-25),

14. 6281141 - Process for forming thin dielectric layers in semiconductor devices (2001-08-28),

15. 6222990 - Heating element for heating the edges of wafers in thermal processing chambers (2001-04-24),

Company Overview

Steag RTP Systems GmbH specializes in advanced technologies for the energy sector, focusing on the development and manufacturing of innovative solutions for power generation and distribution. The company is known for its expertise in optimizing energy efficiency and integrating renewable energy sources into existing infrastructures. With a strong emphasis on research and development, Steag RTP Systems aims to contribute to sustainable energy practices, enhancing the reliability and performance of energy systems globally.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 13 2026

31 Patents

#260 in San Jose, CA

#2,614 in California

#10,927 in US

#21,260 in the World

San Jose, CA, United States of America

Steag Rtp Systems Gmbh

Forward Citations = 1,289

44 inventors:

Randhir P S Thakur (5 out of 143 patents)

Wilfried Lerch (4 out of 13 patents)

Yao Zhi Hu (4 out of 14 patents)

4. Sing Pin Tay (4 out of 6 patents)

5. Markus Hauf (3 out of 62 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Steag Rtp Systems Gmbh. Retrieved from https://idiyas.com/company/steag-rtp-systems

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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