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Dornstadt, Germany

Steag Rtp Systems Gmbh

USPTO Granted Patents = 31

Forward Citations = 1,275

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44 inventors (with patents filed for the assignee):

Randhir P S Thakur (5 out of 143 patents)

Wilfried Lerch (4 out of 13 patents)

Yao Zhi Hu (4 out of 14 patents)

4. Sing Pin Tay (4 out of 6 patents)

5. Markus Hauf (3 out of 62 patents)

6. Julio L Guardado (3 out of 4 patents)

7. Robert J Champetier (3 out of 5 patents)

8. Dieter Zernickel (2 out of 6 patents)

9. Patrick Schmid (2 out of 5 patents)

10. Zsolt Nenyei (2 out of 14 patents)

11. Heinrich Walk (2 out of 9 patents)

12. Helmut Sommer (2 out of 5 patents)

13. Uwe Kreiser (2 out of 2 patents)

14. Werner Blersch (2 out of 4 patents)

15. Helmut Aschner (2 out of 4 patents)

31 patents: Sort by Forward Citations

1. 7041610 - Method and apparatus for the thermal treatment of substrates (2006-05-09),

2. 7004716 - Device and method for aligning disk-shaped substrates (2006-02-28),

3. 6953338 - Device for thermal treatment of substrates (2005-10-11),

4. 6847012 - Apparatus and method for measuring the temperature of substrates (2005-01-25),

5. 6830631 - Method for the removing of adsorbed molecules from a chamber (2004-12-14),

6. 6752625 - Method and apparatus device for the heat treatment of substrates (2004-06-22),

7. 6737367 - UV-supported thermal treatment of compound semiconductors in RTP systems (2004-05-18),

8. 6614005 - Device and method for thermally treating substrates (2003-09-02),

9. 6561694 - Method and device for calibrating measurements of temperatures independent of emissivity (2003-05-13),

10. 6514876 - Pre-metal dielectric rapid thermal processing for sub-micron technology (2003-02-04),

11. 6359263 - System for controlling the temperature of a reflective substrate during rapid heating (2002-03-19),

12. 6316747 - Apparatus for the thermal treatment of substrates (2001-11-13),

13. 6293696 - System and process for calibrating pyrometers in thermal processing chambers (2001-09-25),

14. 6281141 - Process for forming thin dielectric layers in semiconductor devices (2001-08-28),

15. 6222990 - Heating element for heating the edges of wafers in thermal processing chambers (2001-04-24),

STEAG RTP Systems GmbH is a leading provider of thermal process systems for the photovoltaic and semiconductor industries. With over 30 years of experience, STEAG RTP Systems GmbH offers a range of innovative solutions including rapid thermal processing (RTP) systems, vacuum thermal processing systems, and atmospheric thermal processing systems. Their advanced technologies enable highly precise and efficient processes, helping customers achieve optimal results in their manufacturing processes.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 23 2025

31 Patents

#1 in

#1,587 in Germany

#20,624 in the World

Dornstadt, Germany

Steag Rtp Systems Gmbh

Forward Citations = 1,275

44 inventors:

Randhir P S Thakur (5 out of 143 patents)

Wilfried Lerch (4 out of 13 patents)

Yao Zhi Hu (4 out of 14 patents)

4. Sing Pin Tay (4 out of 6 patents)

5. Markus Hauf (3 out of 62 patents)

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