Helmut Aschner

Title: Helmut Aschner: Innovator in Semiconductor Heat Treatment Technology

Introduction

Helmut Aschner is a notable inventor based in Beimerstetten, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the area of heat treatment methods and devices. With a total of four patents to his name, Aschner's work has had a considerable impact on the industry.

Latest Patents

Aschner's latest patents include a "Method and apparatus device for the heat treatment of substrates." This invention relates to a device and a method specifically designed for the heat treatment of substrates, especially semiconductor wafers. The device features a reaction chamber equipped with a compensation element, allowing for easier insertion and withdrawal of the substrate by enabling the compensation element to be at least partly lowered and/or raised within the reaction chamber. Another significant patent is the "Gas driven rotating susceptor for rapid thermal processing (RTP) system." This innovation utilizes air bearings to support a rotating wafer-carrying base in an RTP system. The design protects the base from warping due to radiation absorption from the hot wafer being treated. The preferred embodiment of this invention divides the base into an inner disk that carries the wafer and an outer ring, ensuring optimal support and energy absorption.

Career Highlights

Throughout his career, Helmut Aschner has worked with several prominent companies in the semiconductor industry. Notably, he has been associated with Steag RTP Systems GmbH and Mattson Technology, Inc. His experience in these organizations has allowed him to refine his expertise and contribute to groundbreaking innovations in heat treatment technology.

Collaborations

Aschner has collaborated with several professionals in his field, including Dieter Zernickel and Andreas Hauke. These collaborations have further enriched his work and have led to advancements in semiconductor processing technologies.

Conclusion

Helmut Aschner's contributions to semiconductor heat treatment technology through his patents and career experiences highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor manufacturing.