The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1999
Filed:
Jul. 17, 1997
Applicant:
Inventors:
Helmut Aschner, Beimerstetten, DE;
Helmut Merkle, Tomerdingen, DE;
Ulrich Walk, Ulm, DE;
Dieter Zernickel, Ulm, DE;
Assignee:
Steag-Ast, , DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A21B / ; L23L / ;
U.S. Cl.
CPC ...
392416 ; 219390 ; 219405 ; 219411 ; 392418 ; 118725 ; 118730 ; 118 501 ;
Abstract
A rapid thermal processing (RTP) chamber is disclosed, wherein a transparent plate and a body are sealed with a gas tight seal, and wherein the gas tight seal is activated by inflating an inflatable element.