Location History:
- Ulm, DE (1999 - 2004)
- Amstetten, DE (2002 - 2018)
Company Filing History:
Years Active: 1999-2018
Title: The Innovative Contributions of Dieter Zernickel
Introduction
Dieter Zernickel is a notable inventor based in Amstetten, Germany. He has made significant contributions to the field of thermal processing and measurement technologies. With a total of six patents to his name, Zernickel's work has advanced the capabilities of semiconductor processing and temperature measurement.
Latest Patents
Zernickel's latest patents include a "Measurement object, method for the production thereof and device for the thermal treatment of substrates." This invention describes a measuring object that can be the substrate itself or an object with a known temperature relation to the substrate. The measuring object features a surface with a measuring area designed for optical temperature measurement, incorporating a structure of recessions to influence emissivity. Another significant patent is for "Localized heating and cooling of substrates." This invention focuses on an apparatus and process for controlling the temperature of semiconductor wafers during thermal processing. It includes devices that provide localized heating or cooling through gas nozzles and transparent gas pipes.
Career Highlights
Throughout his career, Zernickel has worked with prominent companies in the technology sector. He has been associated with Steag RTP Systems GmbH and Mattson Technology, Inc. His experience in these organizations has contributed to his expertise in thermal processing technologies.
Collaborations
Zernickel has collaborated with notable professionals in his field, including Helmut Aschner and Andreas Hauke. These collaborations have likely enriched his work and led to innovative advancements in his projects.
Conclusion
Dieter Zernickel's contributions to thermal processing and measurement technologies are noteworthy. His patents reflect a commitment to innovation and improvement in semiconductor processing. His collaborations and career experiences further enhance his impact in the field.
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