The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Dec. 11, 1998
Applicant:
Inventors:
Helmut Aschner, Beimerstetten, DE;
Andreas Hauke, Neu Ulm, DE;
Karsten Weber, Leutenbach, DE;
Dieter Zernickel, Amstetten, DE;
Assignee:
Mattson Technology Corp., Freemont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D 1/100 ;
U.S. Cl.
CPC ...
F27D 1/100 ;
Abstract
Air bearings support a rotating wafer carrying base in an RTP system. The base in proximity to the air bearing is protected from warping due to absorption of radiation from the hot wafer being treated. The most preferred embodiment splits the base into an inner disk carrying the wafer and an outer ring, where the inner ring which absorbs the most energy contacts and is supported at three points by the outer disk which is supported by the air bearing.