Company Filing History:
Years Active: 1999-2002
Title: The Innovative Contributions of Andreas Hauke
Introduction
Andreas Hauke is a notable inventor based in Neu-Ulm, Germany. He has made significant contributions to the field of rapid thermal processing (RTP) systems, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of RTP technology, which is crucial in various manufacturing processes.
Latest Patents
Hauke's latest patents include a gas-driven rotating susceptor for rapid thermal processing systems. This invention features air bearings that support a rotating wafer carrying base in an RTP system. The design ensures that the base, which is in proximity to the air bearing, is protected from warping due to radiation absorption from the hot wafer being treated. The most preferred embodiment of this invention splits the base into an inner disk that carries the wafer and an outer ring. The inner ring, which absorbs the most energy, is supported at three points by the outer disk, which is in turn supported by the air bearing.
Another significant patent by Hauke is a rapid thermal processing system with a gas-driven rotating substrate. This apparatus, method, and system allow the object to be processed to be rotated under the radiation sources of the RTP system by a gas jet system. This innovative approach enhances the processing capabilities of RTP systems.
Career Highlights
Throughout his career, Andreas Hauke has worked with several prominent companies, including Steag RTP Systems GmbH and Mattson Technology, Inc. His experience in these organizations has contributed to his expertise in the field of thermal processing technologies.
Collaborations
Hauke has collaborated with notable professionals in his field, including Helmut Aschner and Dieter Zernickel. These collaborations have further enriched his work and innovations in rapid thermal processing.
Conclusion
Andreas Hauke's contributions to the field of rapid thermal processing are significant and impactful. His innovative patents and collaborations highlight his dedication to advancing technology in this area. His work continues to influence the industry and pave the way for future advancements.