Mattson Technology, Inc

Steag Rtp Systems Gmbh

Andreas Hauke

Dieter Zernickel

Helmut Aschner

Karsten Weber

Ulrich Walk

Air bearings support a rotating wafer carrying base in an RTP system. The base in proximity to the air bearing is protected from warping due to absorption of radiation from the hot wafer being treated. The most preferred embodiment splits the base into an inner disk carrying the wafer and an outer ring, where the inner ring which absorbs the most energy contacts and is supported at three points by the outer disk which is supported by the air bearing.

Gas driven rotating susceptor for rapid thermal processing (RTP) system

An apparatus, method, and system for Rapid Thermal Processing (RTP), whereby the object to be processed is rotated under the radiation sources of the RTP system by a gas jet system, is presented.

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Neu-Ulm, Germany

Andreas Hauke