Company Filing History:
Years Active: 2001-2012
Title: Sing-Pin Tay: Innovator in Semiconductor Processing
Introduction
Sing-Pin Tay is a prominent inventor based in Fremont, CA, known for his significant contributions to the field of semiconductor processing. With a total of seven patents to his name, he has developed innovative methods that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures." This invention describes a plasma-assisted low-temperature radical oxidation process that selectively oxidizes silicon while minimizing the impact on metals or metal oxides present. The selectivity is achieved through careful selection of process parameters, particularly the ratio of H2 to O2 gas. Additionally, the process window can be expanded by injecting H2O steam into the plasma, allowing for oxidation of silicon in the presence of materials like TiN and W at relatively low temperatures. Another notable patent is the "Method and system for thermally processing a plurality of wafer-shaped objects." This invention outlines a process and system for efficiently processing semiconductor wafers in a thermal processing chamber, utilizing a face-to-face or back-to-back configuration for optimal heating.
Career Highlights
Throughout his career, Sing-Pin Tay has worked with notable companies such as Mattson Technology, Inc. and Mattson Thermal Products GmbH. His experience in these organizations has allowed him to refine his expertise in semiconductor technologies and contribute to advancements in the industry.
Collaborations
Sing-Pin Tay has collaborated with several professionals in his field, including Yao Zhi Hu and Paul Janis Timans. These collaborations have further enriched his work and led to innovative solutions in semiconductor processing.
Conclusion
Sing-Pin Tay's contributions to semiconductor processing through his patents and career experiences highlight his role as a key innovator in the field. His work continues to influence advancements in technology and manufacturing processes.
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