Location History:
- Bernsdorf, DE (2006)
- Baernsdorf, DE (2006)
Company Filing History:
Years Active: 2006
Title: Regina Hayn: Innovator in Semiconductor Technology
Introduction
Regina Hayn is a prominent inventor based in Bernsdorf, Germany. She has made significant contributions to the field of semiconductor technology, particularly in the thermal treatment of semiconductor wafers. With a total of two patents to her name, her work has had a notable impact on the industry.
Latest Patents
One of her latest patents is a device and method for thermally treating semiconductor wafers. This innovative device is designed to treat substrates with at least one silicon layer and a metal layer, such as tungsten, which should not be oxidized. The device includes at least one radiation source and a treatment chamber that is substantially transparent to the radiation. Additionally, it features a cover plate that prevents metal or metal oxide from depositing on the chamber's walls.
Another significant patent by Hayn is a method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates. This method effectively reduces the vapor deposition of tungsten oxide by treating the gate structure with a hydrogen-containing, nonaqueous inert gas before and after a treatment step involving a hydrogen/water mixture.
Career Highlights
Throughout her career, Regina Hayn has worked with notable companies in the semiconductor industry. She has been associated with Mattson Thermal Products GmbH and Infineon Technologies AG, where she has contributed her expertise in thermal processing technologies.
Collaborations
Hayn has collaborated with several professionals in her field, including Georg Roters and Steffen Frigge. These collaborations have further enhanced her work and contributions to semiconductor technology.
Conclusion
Regina Hayn is a distinguished inventor whose work in semiconductor technology has led to innovative solutions in thermal treatment processes. Her patents reflect her commitment to advancing the field and addressing challenges in semiconductor manufacturing.