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Vienna, Austria

Ims-ionen Mikrofabrikations Systeme Gmbh

USPTO Granted Patents = 10

Forward Citations = 124

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17 inventors (with patents filed for the assignee):

Gerhard Stengl (6 out of 37 patents)

Alfred Chalupka (5 out of 17 patents)

Hans Loschner (4 out of 18 patents)

4. Ivaylo W Rangelow (3 out of 3 patents)

5. Elmar Platzgummer (2 out of 51 patents)

6. Hans Loeschner (2 out of 6 patents)

7. Hans Löschner (1 out of 4 patents)

8. Robert Nowak (1 out of 5 patents)

9. Herbert Buschbeck (1 out of 8 patents)

10. Herbert Vonach (1 out of 10 patents)

11. Gertraud Lammer (1 out of 6 patents)

12. Ernst Haugeneder (1 out of 4 patents)

13. Stefan Eder (1 out of 1 patent)

14. Ernst Hammel (1 out of 1 patent)

15. Peter Hudek (1 out of 1 patent)

10 patents: Sort by Forward Citations

1. 6909103 - Ion irradiation of a target at very high and very low kinetic ion energies (2005-06-21),

2. 6858118 - Apparatus for enhancing the lifetime of stencil masks (2005-02-22),

3. 6661015 - Pattern lock system (2003-12-09),

4. 6472673 - Lithographic method for producing an exposure pattern on a substrate (2002-10-29),

5. 6326632 - Particle-optical imaging system for lithography purposes (2001-12-04),

6. 6194730 - Electrostatic lens (2001-02-27),

7. 6156217 - Method for the purpose of producing a stencil mask (2000-12-05),

8. 6136160 - Process for producing a carbon film on a substrate (2000-10-24),

9. 5693950 - Projection system for charged particles (1997-12-02),

10. 5672449 - Silicon membrane and method of making same (1997-09-30),

IMS-Ionen Mikrofabrikations Systeme GmbH is a leading provider of innovative ion beam and plasma processing systems for microfabrication. With over 25 years of experience, IMS-Ionen's solutions enable precise and efficient material etching, deposition, and surface modification for a wide range of applications in the semiconductor, display, optics, and research industries.

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Company Badge

USPTO Data Jan 1 1976 - Dec 16 2025

10 Patents

#70 in Vienna

#307 in Austria

#54,271 in the World

Vienna, Austria

Ims-ionen Mikrofabrikations Systeme Gmbh

Forward Citations = 124

17 inventors:

Gerhard Stengl (6 out of 37 patents)

Alfred Chalupka (5 out of 17 patents)

Hans Loschner (4 out of 18 patents)

4. Ivaylo W Rangelow (3 out of 3 patents)

5. Elmar Platzgummer (2 out of 51 patents)

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