Vienna, Austria

Ernst Haugeneder


Average Co-Inventor Count = 3.8

ph-index = 3

Forward Citations = 76(Granted Patents)


Company Filing History:


Years Active: 2002-2004

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4 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Ernst Haugeneder

Introduction

Ernst Haugeneder is a notable inventor based in Vienna, Austria. He has made significant contributions to the field of lithography and mask fabrication, holding a total of four patents. His work focuses on enhancing the performance and reliability of masks used in advanced manufacturing processes.

Latest Patents

One of Haugeneder's latest patents is titled "Large-area membrane mask and method for fabricating the mask." This invention aims to increase the rigidity of a membrane mask utilized in ion projection lithography. The design incorporates a second wafer made from the same material as the membrane layer, which is patterned to form a second carrying ring. This innovative approach ensures that the membrane area is centered between the first and second carrying rings, enhancing its structural integrity.

Another significant patent is the "Method of producing a perforated mask for particle radiation." This method involves calculating the elasticity of adjacent cells of a mask concerning longitudinal and shear stresses. By determining the length and direction of the edge sections of the openings, Haugeneder's method allows for the precise production of mask openings, optimizing their performance under expected deformation forces.

Career Highlights

Throughout his career, Ernst Haugeneder has worked with various companies, including Ims-ionen Mikrofabrikations Systeme GmbH. His expertise in mask fabrication and lithography has positioned him as a key figure in the development of advanced manufacturing technologies.

Collaborations

Haugeneder has collaborated with notable professionals in his field, including Albrecht Ehrmann and Frank-Michael Kamm. These partnerships have contributed to the advancement of innovative solutions in mask technology.

Conclusion

Ernst Haugeneder's contributions to the field of lithography and mask fabrication are noteworthy. His innovative patents and collaborations reflect his commitment to advancing technology in this critical area of manufacturing. His work continues to influence the industry and inspire future innovations.

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