The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Aug. 08, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Tianhan Wang, Milpitas, CA (US);
Aaron Rosenberg, Milpitas, CA (US);
Dawei Hu, Milpitas, CA (US);
Alexander Kuznetsov, Milpitas, CA (US);
Manh Dang Nguyen, Milpitas, CA (US);
Stilian Pandev, Santa Clara, CA (US);
John Lesoine, Milpitas, CA (US);
Qiang Zhao, Milpitas, CA (US);
Liequan Lee, Fremont, CA (US);
Houssam Chouaib, San Jose, CA (US);
Ming Di, Hayward, CA (US);
Torsten R. Kaack, Los Altos, CA (US);
Andrei V. Shchegrov, Campbell, CA (US);
Zhengquan Tan, Milpitas, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.