Company Filing History:
Years Active: 2016-2023
Title: Liequan Lee: Innovator in Spectroscopic Metrology
Introduction
Liequan Lee, an accomplished inventor based in Fremont, CA, has made significant contributions to the field of metrology through his innovative patents. With a total of 13 patents to his name, Lee's work focuses on advancing techniques for bandgap measurements and improving measurement systems used in semiconductor manufacturing.
Latest Patents
Lee's latest patents showcase his expertise in spectroscopic metrology, including two notable inventions:
1. **Bandgap measurements of patterned film stacks using spectroscopic metrology**: This invention presents a system that employs a spectroscopic metrology tool alongside a controller to model multilayer gratings. The system aims to predict bandgaps of test layers based on comprehensive data analysis and ensures measurements remain within specified tolerances.
2. **Scatterometry modeling in the presence of undesired diffraction orders**: This patent enhances measurement accuracy by using a model that incorporates a weighting function. This function minimizes the influence of undesired diffraction orders in spectroscopic scatterometry data, improving the reliability of measurements for target attributes.
Career Highlights
Liequan Lee has held key positions in major companies, including Kla Tencor Corporation and Kla Corporation. His experiences in these organizations have enabled him to develop and refine his innovative approaches in metrology, further contributing to the semiconductor industry's technological advancement.
Collaborations
Throughout his career, Lee has collaborated with notable professionals in the field, including Houssam Chouaib and Leonid Poslavsky. Their collective expertise has contributed to the advancement of measurement technologies and has helped shape the landscape of modern semiconductor processing.
Conclusion
Liequan Lee's contributions to spectroscopic metrology through his patents have left a lasting impact on the semiconductor industry. His innovative approaches continue to inspire new developments in measurement techniques, positioning him as a leading inventor in the field. Lee's work exemplifies the importance of innovation in driving technological progress, making significant strides in both accuracy and efficiency.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.