Yuri Belenky

Title: The Innovative Mind of Yuri Belenky

Introduction

Yuri Belenky is a notable inventor based in Rishon Lezion, Israel. He has made significant contributions to the field of technology, particularly in the area of electron beam tools. With a total of 5 patents to his name, Belenky's work showcases his expertise and innovative spirit.

Latest Patents

One of Belenky's latest patents is focused on compensating for electromagnetic interference induced deviation of an electron beam. This invention includes a method, a non-transitory computer readable medium, and a system designed to address this issue. The method involves obtaining measurement information about a magnetic field within an electron beam tool, generated by at least one planar Hall Effect magnetic sensor. This sensor comprises at least one magnetometer integrated with a magnetic flux concentrator. The process estimates the electromagnetic interference induced deviation of the electron beam based on the magnetic field and sets a trajectory to compensate for this deviation.

Another significant patent is related to a chuck for supporting a wafer. This invention features a support module that includes a chuck and a vertical stage. The chuck consists of multiple independently movable segments, allowing for precise positioning under different areas of the substrate. The vertical stage is equipped with multiple piezoelectric motors, which enable nanometric scale elevation and lowering movements, further enhancing the functionality of the chuck.

Career Highlights

Yuri Belenky has worked with prominent organizations such as Applied Materials Israel Limited and Bar-Ilan University. His experience in these institutions has contributed to his development as an inventor and has allowed him to collaborate with other experts in the field.

Collaborations

Belenky has had the opportunity to work alongside talented individuals, including Yoram Uziel and Ron Naftali. These collaborations have likely enriched his work and led to further advancements in his inventions.

Conclusion

Yuri Belenky's innovative contributions to technology, particularly in electron beam tools, highlight his expertise and dedication to advancing the field. His patents reflect a deep understanding of complex systems and a commitment to solving real-world problems.