The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Apr. 20, 2016
Applied Materials Israel Ltd., Rehovot, IL;
Doron Korngut, Modiin, IL;
Yuri Belenky, Rishon Lezion, IL;
Yoram Uziel, Misgav, IL;
Ron Naftali, Shoham, IL;
Ron Bar-or, Ramat-Gan, IL;
Yuval Gronau, Ramat Hasharon, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
According to an embodiment, a support module is provided for supporting a substrate. The support module may include a chuck and a vertical stage. The chuck may include multiple chuck segments that are independently movable. When the substrate is positioned on the chuck, different chuck segments are positioned under different areas of the substrate. The vertical stage may include multiple piezoelectric motors. Each piezoelectric motor may be configured to perform nanometric scale elevation and lowering movements. The multiple piezoelectric motors may be configured to independently move the multiple chuck segments.