The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2018
Filed:
Dec. 07, 2016
Applied Materials Israel Ltd., Rehovot, IL;
Yoram Uziel, Misgav, IL;
Benzion Sender, Modiin-Macabim-Reut, IL;
Doron Aspir, Modiin-Macabim-Reut, IL;
Yohanan Madmon, Kiryat Eqron, IL;
Ron Naftali, Shoham, IL;
Yuri Belenky, Rishon Lezion, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.