Yousuke Itagaki

Title: Yousuke Itagaki: Innovator in Plasma Processing Technology

Introduction

Yousuke Itagaki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 14 patents. His innovative work focuses on controlling particle production in electric and magnetic fields, which has important applications in semiconductor manufacturing.

Latest Patents

One of Itagaki's latest patents is an object-processing apparatus that controls the production of particles in an electric or magnetic field. This apparatus includes a housing that defines a chamber where an electric field is generated. An internal member, made partially of dielectric material, is situated within this chamber. The process executed in the chamber allows for the formation of a dielectric deposit on the internal member. The patent specifies that the mass density and permittivity values of both the dielectric material and the deposit are set to ensure proper control over particle production.

Another notable patent is a plasma processing apparatus designed to suppress abnormal discharge. This apparatus features an electrostatic chuck that holds a semiconductor wafer using electrostatic adsorption force. It includes a DC power supply that applies an electrostatic adsorption voltage. To prevent abnormal discharge in plasma, the apparatus is equipped with a signal detector that anticipates potential discharge events. A controller adjusts the electrostatic adsorption voltage based on the detected foresee signal, thereby maintaining stable operation.

Career Highlights

Yousuke Itagaki has worked with several notable companies throughout his career, including Fab Solutions, Inc. and Renesas Electronics Corporation. His experience in these organizations has allowed him to refine his expertise in plasma processing and related technologies.

Collaborations

Itagaki has collaborated with several professionals in his field, including Keizo Yamada and Takeo Ushiki. These collaborations have contributed to the advancement of his innovative projects and patents.

Conclusion

Yousuke Itagaki is a distinguished inventor whose work in plasma processing technology has led to significant advancements in the field. His patents reflect a deep understanding of the complexities involved in controlling particle production, making him a key figure in semiconductor manufacturing innovation.