The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Jun. 28, 2007
Yousuke Itagaki, Kawasaki, JP;
Natsuko Ito, Kawasaki, JP;
Fumihiko Uesugi, Kawasaki, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Abstract
An apparatus includes a housing defining a chamber in which an electric field is generated, and an internal member provided in the chamber. At least one part of the internal member is formed of a dielectric material. A process is executed in the chamber so that a dielectric deposit is formed on the at least one part of the internal member. An m(d∈/dm) value of the dielectric material and an m(d∈/dm) value of the dielectric deposit are set so that production of particles from the deposit is properly controlled. The term mis a mass density of the dielectric material, ∈is a permittivity of the dielectric material, mis a mass density of the dielectric deposit, and ∈is a permittivity of the dielectric deposit.