The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Feb. 21, 2002
Applicants:
Takeo Ushiki, Tokyo, JP;
Keizo Yamada, Tokyo, JP;
Yousuke Itagaki, Tokyo, JP;
Inventors:
Assignee:
Fab Solutions, Inc., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1600 ;
U.S. Cl.
CPC ...
Abstract
The semiconductor manufacturing device according to the present invention having a mechanical drive part which is moved in a vacuum device while holding a substrate includes at least one discharge port for introducing an inert gas into the vacuum device, and a flow rate control part for controlling the inert gas which is discharged into the vacuum device from the discharge port at a constant flow rate.