The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2004
Filed:
Nov. 01, 2000
Applicant:
Inventors:
Keizo Yamada, Tokyo, JP;
Tohru Tsujide, Tokyo, JP;
Yousuke Itagaki, Tokyo, JP;
Takeo Ushiki, Tokyo, JP;
Assignee:
Fab Solutions, Inc., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract
Current produced in a sample by irradiating the sample with parallel electron beam is measured by an ammeter . The measurement is repeated while changing acceleration voltage of electron beam . An information related to a structure of the sample in a depth direction thereof is obtained by a data processor , on the basis or a difference in transmittivity of electron beam into the sample due to the difference of acceleration voltage.