Kyoto, Japan

Yasuo Kawamatsu

USPTO Granted Patents = 15 

 

Average Co-Inventor Count = 5.3

ph-index = 6

Forward Citations = 100(Granted Patents)


Location History:

  • Shimogyo-ku, JP (2014)
  • Kyoto, JP (2002 - 2019)

Company Filing History:


Years Active: 2002-2025

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15 patents (USPTO):Explore Patents

Title: Yasuo Kawamatsu: Innovator in Substrate Treatment Technology

Introduction

Yasuo Kawamatsu is a prominent inventor based in Kyoto, Japan, known for his significant contributions to substrate treatment technology. With a total of 15 patents to his name, Kawamatsu has developed innovative solutions that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

One of his latest patents is a substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates. This apparatus includes a plurality of substrate treatment lines arranged vertically, allowing for various types of treatment on substrates while transporting them substantially horizontally. The controller in this system enables the convenient alteration of treatment processes for each substrate treatment line, facilitating parallel processing of different treatments. Another notable patent involves a substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe. This method allows for resist film forming treatment and developing treatment to be performed in parallel on multiple stories within the treating section.

Career Highlights

Kawamatsu has worked with notable companies in the semiconductor industry, including Screen Semiconductor Solutions Co., Ltd. and Sokudo Co., Ltd. His experience in these organizations has contributed to his expertise in substrate treatment technologies.

Collaborations

Throughout his career, Kawamatsu has collaborated with esteemed colleagues such as Yoshiteru Fukutomi and Tsuyoshi Mitsuhashi. These partnerships have furthered his research and development efforts in the field.

Conclusion

Yasuo Kawamatsu's innovative work in substrate treatment technology has made a significant impact on the industry. His patents reflect a commitment to advancing the efficiency of substrate processing, showcasing his role as a leading inventor in this field.

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