The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Jun. 27, 2008
Yoshiteru Fukutomi, Shimogyo-ku, JP;
Tsuyoshi Mitsuhashi, Shimogyo-ku, JP;
Hiroyuki Ogura, Shimogyo-ku, JP;
Kenya Morinishi, Shimogyo-ku, JP;
Yasuo Kawamatsu, Shimogyo-ku, JP;
Hiromichi Nagashima, Shimogyo-ku, JP;
Yoshiteru Fukutomi, Shimogyo-ku, JP;
Tsuyoshi Mitsuhashi, Shimogyo-ku, JP;
Hiroyuki Ogura, Shimogyo-ku, JP;
Kenya Morinishi, Shimogyo-ku, JP;
Yasuo Kawamatsu, Shimogyo-ku, JP;
Hiromichi Nagashima, Shimogyo-ku, JP;
Sokudo Co., Ltd., Kyoto, JP;
Abstract
A substrate treating apparatus includes a plurality of substrate treatment lines arranged vertically. Each substrate treatment line has a plurality of main transport mechanisms arranged horizontally, and a plurality of treating units provided for each main transport mechanism for treating substrates. A series of treatments is carried out for the substrates, with each main transport mechanism transporting the substrates to the treating units associated therewith, and transferring the substrates to the other main transport mechanism horizontally adjacent thereto. The substrate treating apparatus realizes increased processing capabilities by treating the substrates in parallel through the substrate treatment lines.