The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Nov. 26, 2008
Hiroyuki Ogura, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Yoshiteru Fukutomi, Kyoto, JP;
Kenya Morinishi, Kyoto, JP;
Yasuo Kawamatsu, Kyoto, JP;
Hiromichi Nagashima, Kyoto, JP;
Hiroyuki Ogura, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Yoshiteru Fukutomi, Kyoto, JP;
Kenya Morinishi, Kyoto, JP;
Yasuo Kawamatsu, Kyoto, JP;
Hiromichi Nagashima, Kyoto, JP;
Sokudo Co., Ltd., Kyoto, JP;
Abstract
The invention provides coating units, heat-treating units, and a first main transport mechanism for transporting substrates to each of these treating units. The substrates are transferred from the first main transport mechanism to a second main transport mechanism through a receiver. When a substrate cannot be placed on the receiver, this substrate is placed on a buffer. Thus, the first main transport mechanism can continue transporting other substrates. The other substrates in the treating units are transported between the treating units without delay, to receive a series of treatments including coating treatment and heat treatment as scheduled. This prevents lowering of the quality of treatment for forming film on the substrates.