The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Jul. 30, 2014
Sokudo Co., Ltd., Kyoto, JP;
Hiroyuki Ogura, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Yoshiteru Fukutomi, Kyoto, JP;
Kenya Morinishi, Kyoto, JP;
Yasuo Kawamatsu, Kyoto, JP;
Hiromichi Nagashima, Kyoto, JP;
SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD., Kyoto, JP;
Abstract
A treating section has substrate treatment lines arranged one over the other for treating substrates while transporting the substrates substantially horizontally. An IF section transports the substrates fed from each substrate treatment line to an exposing machine provided separately from this apparatus. The substrates are transported to the exposing machine in the order in which the substrates are loaded into the treating section. The throughput of this apparatus can be improved greatly, without increasing the footprint, since the substrate treatment lines are arranged one over the other. Each substrate can be controlled easily since the order of the substrates transported to the exposing machine is in agreement with the order of the substrates loaded into the treating section.