The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Feb. 21, 2012
Yoshiteru Fukutomi, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Hiroyuki Ogura, Shimogyo-ku, JP;
Kenya Morinishi, Kyoto, JP;
Yasuo Kawamatsu, Kyoto, JP;
Hiromichi Nagashima, Kyoto, JP;
Yoshiteru Fukutomi, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Hiroyuki Ogura, Shimogyo-ku, JP;
Kenya Morinishi, Kyoto, JP;
Yasuo Kawamatsu, Kyoto, JP;
Hiromichi Nagashima, Kyoto, JP;
Screen Semiconductor Solutions Co., Ltd., Kyoto, JP;
Abstract
A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units. The treating units include solution treating units and heat-treating units. The solution treating units are arranged at one side of the transporting space, the heat-treating units are arranged at the other side of the transporting space, and the main transport mechanism and the treating units are in substantially the same layout in plan view for the respective cells. The solution treating units are in substantially the same layout in side view for the respective cells, the heat-treating units are in substantially the same layout in side view for the respective cells, and treatments of the substrates carried out in the respective cells are the same.