This inventor holds 9 USPTO granted patents and 2 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2015-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2015-2025
Title: Innovator Spotlight: Ya-Hui Chang
Introduction
Ya-Hui Chang, an accomplished inventor based in Hsinchu, Taiwan, has significantly contributed to the field of semiconductor technology. With a remarkable portfolio of six patents, Chang's work plays a crucial role in advancing semiconductor processes and equipment.
Latest Patents
Chang’s latest inventions include a "System and method for multiple step directional patterning," which features a semiconductor process system that utilizes an ion source to bombard a photoresist structure on a wafer. This innovative system effectively reduces the width of the photoresist structure by employing multiple distinct ion bombardment steps with varying characteristics. Another notable patent is the "Etch apparatus for compensating shifted overlayers." This current disclosure pertains to a plasma etching system that integrates a movable plasma source and a movable wafer stage, allowing the position between these components to be adjusted to optimize the angle at which plasma particles strike the wafer.
Career Highlights
Ya-Hui Chang has made significant strides in semiconductor innovation through positions held at Taiwan Semiconductor Manufacturing Company Limited, a leading global chip manufacturer. Chang's contributions to the field highlight not only technical expertise but also a commitment to advancing semiconductor manufacturing processes.
Collaborations
Throughout her career, Chang has collaborated with talented coworkers, including Yu-Tien Shen and Chun-Yen Chang. These partnerships foster a creative environment that enables the development of pioneering technologies and enhances the company’s overall innovation objectives.
Conclusion
In summary, Ya-Hui Chang exemplifies the spirit of innovation within the semiconductor industry. With a strong patent portfolio and impactful collaborations, Chang continues to drive technological advancements at Taiwan Semiconductor Manufacturing Company Limited, further solidifying her reputation as a leading inventor in the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile