Wen Dar Liu

Title: Wen Dar Liu: Innovator in Semiconductor Manufacturing

Introduction

Wen Dar Liu, based in Chupei, Taiwan, is a prolific inventor with an impressive portfolio of 31 patents. His work primarily focuses on innovations in semiconductor manufacturing processes, particularly in etching technologies. Liu's inventions are critical for advancing the efficiency and effectiveness of electronic device production.

Latest Patents

Among Liu's latest patented technologies is a Co/Cu selective wet etchant. This innovative etchant exhibits high etching rates for copper and cobalt, allowing for a controlled ratio between the two metals. The formulation includes at least one alkanolamine with multiple substituents, a pH adjuster, a chelating agent, and water. This composition enhances the etching process's precision and versatility.

Another notable patent by Liu pertains to an etching composition designed for selectively removing silicon nitride during semiconductor device manufacturing. This invention comprises phosphoric acid and a silicon-containing compound mixed with an aqueous solvent. The etching composition is particularly valuable for selectively removing silicon nitride while preserving silicon oxide layers on microelectronic devices.

Career Highlights

Wen Dar Liu has made significant contributions to the field of semiconductor manufacturing through his roles at leading companies. He has worked with Versum Materials US, LLC and Air Products and Chemicals, Inc., where he helped develop innovative solutions that streamline production processes. His expertise has been invaluable in enhancing the capabilities of semiconductor technologies.

Collaborations

Throughout his career, Liu has collaborated with notable individuals in the field, including Yi-Chia Lee and Tianniu Chen. These partnerships emphasize the importance of teamwork in driving innovation and achieving breakthroughs in semiconductor manufacturing processes.

Conclusion

Wen Dar Liu stands out as a distinguished inventor whose contributions to the semiconductor industry continue to impact technological advancements. His patents reflect a commitment to innovation, showcasing methods that improve efficiency and reliability in electronic device manufacturing. With a track record of successful patents, Liu is poised to remain a key player in the evolution of semiconductor technologies.