Wayne Glenn Renken

Title: **Wayne Glenn Renken: A Pioneering Innovator in Semiconductor Measurement Technologies**

Introduction

Wayne Glenn Renken, based in San Jose, California, is a distinguished inventor with an impressive portfolio of 26 patents. His innovative contributions in the field of semiconductor technology have significantly enhanced the processes involved in wafer manufacturing.

Latest Patents

Among his latest patents, Wayne has developed a 'Process Condition Sensing Wafer and Data Analysis System.' This measuring device integrates a substrate with sensors that monitor the processing conditions that a wafer experiences during manufacturing. The design allows for the substrate to be inserted into a processing chamber by a robotic head, enabling real-time transmission or storage of conditions for future analysis. The device’s sensitive electronic components are strategically distanced from harsh processing conditions, thereby improving its accuracy, operating range, and reliability.

Another notable invention is the 'Process Condition Measuring Device.' This sophisticated instrument measures various parameters across a substrate utilizing multiple sensors distributed over its surface. Each sensor captures measurements from different positions, and the electronic processing component helps analyze the collected data. The device's design mimics the properties of a production substrate, ensuring compatibility during substrate processes. This innovation facilitates the characterization of a production wafer's behavior based on the collected measurements.

Career Highlights

Wayne's impressive career includes significant roles at leading technology companies, such as Sensarray Corporation and KLA-Tencor Corporation. His work at these firms has contributed to advancements in measurement and analysis technologies related to semiconductor production.

Collaborations

Throughout his career, Wayne has had the privilege of collaborating with esteemed colleagues, including Mei H. Sun and Roy Gordon. Their combined expertise has propelled numerous projects forward and fostered innovation within their fields.

Conclusion

Wayne Glenn Renken's contributions to semiconductor measurement technologies illustrate his commitment to innovation and excellence. With a robust portfolio of patents and a track record of collaboration with industry leaders, he continues to impact the field significantly. His inventions pave the way for enhanced accuracy and reliability in wafer manufacturing processes.