The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2010
Filed:
Sep. 25, 2007
Wayne G. Renken, San Jose, CA (US);
Mei H. Sun, Los Altos, CA (US);
Aron Abramowski Mason, San Mateo, CA (US);
Lynn Karl Wiese, Santa Clara, CA (US);
Wayne G. Renken, San Jose, CA (US);
Mei H. Sun, Los Altos, CA (US);
Aron Abramowski Mason, San Mateo, CA (US);
Lynn Karl Wiese, Santa Clara, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
At least one pair of capacitively coupled electrodes contained in a structure is used to sense the deflection of a diaphragm in a pressure or force sensor for measuring the pressure or force exerted on the diaphragm. Preferably the structure has properties (such as one or more of the following: dimensions, hardness, area and flexibility) that are substantially the same as those of a real substrate, such as a semiconductor wafer or flat panel display panel.