For the Inventor, By the Inventor

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Santa Clara, CA, United States of America

Sensarray Corporation

USPTO Granted Patents = 14

% Expired Patents = 21.4

Trademarks = 2

Forward Citations = 411

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14 inventors (with patents filed for the assignee):

Wayne Glenn Renken (13 out of 26 patents)

Mei H Sun (5 out of 44 patents)

Roy Gordon (4 out of 5 patents)

4. Earl M Jensen (3 out of 27 patents)

5. Forrest Gilbert Yetter, Jr (1 out of 2 patents)

6. Jeffrey M Parker (1 out of 3 patents)

7. John B Pieper (1 out of 2 patents)

8. Brian Paquette (1 out of 2 patents)

9. Richard Schwaninger (1 out of 1 patent)

10. Llewellyn E Wall (1 out of 6 patents)

11. Arwa Ginwalla (1 out of 1 patent)

12. Peter Michael Noel Vandenabeele (1 out of 1 patent)

13. Paul Miller (1 out of 1 patent)

14. Peter Michel Vandenabeele (1 out of 6 patents)

14 patents: Sort by Forward Citations

1. 7363195 - Methods of configuring a sensor network (2008-04-22),

2. 7360463 - Process condition sensing wafer and data analysis system (2008-04-22),

3. 7156924 - System and method for heating and cooling wafer at accelerated rates (2007-01-02),

4. 7151366 - Integrated process condition sensing wafer and data analysis system (2006-12-19),

5. 7149643 - Integrated process condition sensing wafer and data analysis system (2006-12-12),

6. 7135852 - Integrated process condition sensing wafer and data analysis system (2006-11-14),

7. 6915589 - Sensor positioning systems and methods (2005-07-12),

8. 6889568 - Process condition sensing wafer and data analysis system (2005-05-10),

9. 6616332 - Optical techniques for measuring parameters such as temperature across a surface (2003-09-09),

10. 6325536 - Integrated wafer temperature sensors (2001-12-04),

11. 6190040 - Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool (2001-02-20),

12. 5967661 - Temperature calibration substrate (1999-10-19),

13. 5929689 - Photodetector quiescent current compensation method and apparatus (1999-07-27),

14. 5746513 - Temperature calibration substrate (1998-05-05),

Sensarray Corporation, based in Santa Clara, California, specializes in advanced sensor technology and data analytics solutions. The company focuses on developing innovative systems for temperature and environmental monitoring, primarily serving industries such as semiconductor manufacturing and other precision applications. Sensarray's expertise lies in creating high-resolution, real-time monitoring solutions that enhance operational efficiency and ensure product quality, positioning itself as a leader in the sensor technology domain.

Profile summary based on public USPTO records.

Company Badge

USPTO Data Jan 1 1976 - Oct 6 2026

14 Patents

#218 in Santa Clara, CA

#5,317 in California

#22,302 in US

#42,199 in the World

Santa Clara, CA, United States of America

Sensarray Corporation

Forward Citations = 411

14 inventors:

Wayne Glenn Renken (13 out of 26 patents)

Mei H Sun (5 out of 44 patents)

Roy Gordon (4 out of 5 patents)

4. Earl M Jensen (3 out of 27 patents)

5. Forrest Gilbert Yetter, Jr (1 out of 2 patents)

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