For the Inventor, By the Inventor

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Santa Clara, CA, United States of America

Sensarray Corporation

USPTO Granted Patents = 14

Trademarks = 2

Forward Citations = 401

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14 inventors (with patents filed for the assignee):

Wayne Glenn Renken (13 out of 26 patents)

Mei H Sun (5 out of 44 patents)

Roy Gordon (4 out of 5 patents)

4. Earl M Jensen (3 out of 26 patents)

5. Forrest Gilbert Yetter, Jr (1 out of 2 patents)

6. Jeffrey M Parker (1 out of 3 patents)

7. John B Pieper (1 out of 2 patents)

8. Brian Paquette (1 out of 2 patents)

9. Richard Schwaninger (1 out of 1 patent)

10. Llewellyn E Wall (1 out of 6 patents)

11. Arwa Ginwalla (1 out of 1 patent)

12. Peter Michael Noel Vandenabeele (1 out of 1 patent)

13. Paul Miller (1 out of 1 patent)

14. Peter Michel Vandenabeele (1 out of 6 patents)

14 patents: Sort by Forward Citations

1. 7363195 - Methods of configuring a sensor network (2008-04-22),

2. 7360463 - Process condition sensing wafer and data analysis system (2008-04-22),

3. 7156924 - System and method for heating and cooling wafer at accelerated rates (2007-01-02),

4. 7151366 - Integrated process condition sensing wafer and data analysis system (2006-12-19),

5. 7149643 - Integrated process condition sensing wafer and data analysis system (2006-12-12),

6. 7135852 - Integrated process condition sensing wafer and data analysis system (2006-11-14),

7. 6915589 - Sensor positioning systems and methods (2005-07-12),

8. 6889568 - Process condition sensing wafer and data analysis system (2005-05-10),

9. 6616332 - Optical techniques for measuring parameters such as temperature across a surface (2003-09-09),

10. 6325536 - Integrated wafer temperature sensors (2001-12-04),

11. 6190040 - Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool (2001-02-20),

12. 5967661 - Temperature calibration substrate (1999-10-19),

13. 5929689 - Photodetector quiescent current compensation method and apparatus (1999-07-27),

14. 5746513 - Temperature calibration substrate (1998-05-05),

Sensarray Corporation is a leading provider of thermal management solutions for the semiconductor industry. With cutting-edge technology and innovative products, Sensarray helps customers optimize their manufacturing processes to improve efficiency and reduce costs. The company's high-quality sensors and monitoring systems are trusted by world-class manufacturers worldwide.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

14 Patents

#260 in Santa Clara, CA

#5,147 in California

#21,598 in US

#40,882 in the World

Santa Clara, CA, United States of America

Sensarray Corporation

Forward Citations = 401

14 inventors:

Wayne Glenn Renken (13 out of 26 patents)

Mei H Sun (5 out of 44 patents)

Roy Gordon (4 out of 5 patents)

4. Earl M Jensen (3 out of 26 patents)

5. Forrest Gilbert Yetter, Jr (1 out of 2 patents)

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