The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Apr. 29, 2004
Wayne Glenn Renken, San Jose, CA (US);
Earl M. Jensen, San Jose, CA (US);
Roy Gordon, San Jose, CA (US);
Brian Paquette, Austin, TX (US);
Mei H. Sun, Los Altos, CA (US);
Wayne Glenn Renken, San Jose, CA (US);
Earl M. Jensen, San Jose, CA (US);
Roy Gordon, San Jose, CA (US);
Brian Paquette, Austin, TX (US);
Mei H. Sun, Los Altos, CA (US);
SensArray Corporation, Santa Clara, CA (US);
Abstract
A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. Process conditions may be measured with little disturbance to the production environment. Data may be transferred from a process condition-measuring device to a user with little or no human intervention.