The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Apr. 21, 2008
Forrest Gilbert Yetter, Jr., Austin, TX (US);
Jeffrey M. Parker, Cedar Park, TX (US);
Wayne G. Renken, San Jose, CA (US);
John B. Pieper, Coralville, IA (US);
Forrest Gilbert Yetter, Jr., Austin, TX (US);
Jeffrey M. Parker, Cedar Park, TX (US);
Wayne G. Renken, San Jose, CA (US);
John B. Pieper, Coralville, IA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for a more simplified configuration.