The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Sep. 25, 2007
Wayne G. Renken, San Jose, CA (US);
Mei H. Sun, Los Altos, CA (US);
Aron Abramowski Mason, San Mateo, CA (US);
Wayne G. Renken, San Jose, CA (US);
Mei H. Sun, Los Altos, CA (US);
Aron Abramowski Mason, San Mateo, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
At least one shear force sensor is used to measure the shear force on a member, when the member is in contact with and pressed against a polishing or planarization surface and a lateral force is applied between the two surfaces. Preferably the structure and the surface of the structure have properties (such as one or more of the following: dimensions and coefficient of friction) that are substantially the same as those of a real substrate, such as a semiconductor wafer or flat panel display panel.