Company Filing History:
Years Active: 2001-2016
Title: Inventor Spotlight: Vladimir B. Fleurov
Introduction:
Vladimir B. Fleurov is a prolific inventor based in Escondido, CA, with an impressive portfolio of 14 patents to his name. His innovative work in the field of extreme-ultraviolet (EUV) light sources has paved the way for cutting-edge technologies in laser production and plasma applications.
Latest Patents:
1. Systems and methods for buffer gas flow stabilization in a laser produced plasma light source: Fleurov's patent introduces a novel system for stabilizing buffer gas flow in an EUV light source, enhancing the efficiency and performance of laser-produced plasma technologies.
2. Methods and apparatus for laser produced plasma EUV light source: This patent showcases Fleurov's expertise in developing systems for producing EUV light using laser beams to irradiate material droplets, with a focus on monitoring and analyzing beam reflections and radiation pulses for optimal performance.
Career Highlights:
Fleurov has made significant contributions to the field through his work at companies like Cymer, Inc. and ASML Netherlands B.V. His expertise in developing advanced technologies for EUV light production has been instrumental in advancing the capabilities of semiconductor manufacturing and related industries.
Collaborations:
Throughout his career, Fleurov has collaborated with esteemed professionals in the field, including Igor Vladimirovich Fomenkov and William N. Partlo. These collaborations have led to groundbreaking innovations and the development of cutting-edge solutions in laser-produced plasma technology.
Conclusion:
Vladimir B. Fleurov's dedication to innovation and his pioneering work in the field of EUV light sources have cemented his legacy as a leading inventor in the industry. His contributions continue to drive advancements in laser technology and plasma applications, shaping the future of semiconductor manufacturing and related fields.