The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Jun. 08, 2011
Vladimir B. Fleurov, Escondido, CA (US);
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Vladimir B. Fleurov, Escondido, CA (US);
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An extreme-ultraviolet (EUV) light source comprising an optic, a target material, and a laser beam passing through said optic along a beam path to irradiate said target material. The EUV light source further includes a system generating a gas flow directed toward said target material along said beam path, said system having a tapering member surrounding a volume and a plurality of gas lines, each gas line outputting a gas stream into said volume.