The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2002
Filed:
Jun. 09, 2000
Vladimir B. Fleurov, Escondido, CA (US);
Michael C. Cates, Escondido, CA (US);
Michael Du'Lyea, Lakeside, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Dmitri V. Gaidarenko, Poway, CA (US);
Jean-Marc Hueber, La Jolla, CA (US);
Richard G. Morton, San Diego, CA (US);
Eckehard D. Onkels, San Diego, CA (US);
Robert A. Shannon, Ramona, CA (US);
Ross H. Winnick, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.