This inventor holds 4 USPTO granted patents and 1 EPO patent. Top assignee: Cymer, Inc.. Active years: 2001-2003.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001-2003
Title: Michael C. Cates: Innovator in Gas Discharge Laser Technology
Introduction
Michael C. Cates is a prominent inventor based in Escondido, California. He has made significant contributions to the field of gas discharge laser technology, holding a total of 4 patents. His innovative work focuses on enhancing the performance and longevity of laser systems.
Latest Patents
One of his latest patents is titled "Flow shaping electrode with erosion pad for gas discharge laser." This invention features an excimer laser with a laser chamber that contains a circulating laser gas, including fluorine, and a set of long-life electrode structures. The design incorporates an erosion pad and a cross-section shape that facilitates a gradual increase in flow cross-section between the discharge region and the circulating tangential fan blade. The electrode's lifetime is notably increased by annealing the erosion rod after machining, which alleviates surface stress and minimizes erosion caused by fluorine chemical attack. Another significant patent is for "Gas discharge laser long life electrodes," which describes a gas discharge laser with two elongated erodable electrode elements. These elements are designed to minimize turbulence in the discharge region and allow for gradual erosion over more than 8 billion pulses without altering the shape of electrical discharges.
Career Highlights
Michael C. Cates is currently employed at Cymer, Inc., where he continues to develop cutting-edge technologies in laser systems. His work has been instrumental in advancing the efficiency and reliability of gas discharge lasers, making them more effective for various applications.
Collaborations
Throughout his career, Cates has collaborated with notable colleagues, including Richard C. Ujazdowski and Richard G. Morton. These partnerships have contributed to the innovative advancements in the field of laser technology.
Conclusion
Michael C. Cates stands out as a key figure in the development of gas discharge laser technology. His patents reflect a commitment to innovation and improvement in laser systems, showcasing his expertise and dedication to the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
