San Diego, CA, United States of America

Eckehard D Onkels



Average Co-Inventor Count = 6.1

ph-index = 12

Forward Citations = 639(Granted Patents)


Company Filing History:


Years Active: 2001-2009

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20 patents (USPTO):Explore Patents

Title: **Eckehard D Onkels: Innovator in Gas Discharge Laser Technology**

Introduction

Eckehard D Onkels, based in San Diego, CA, is a prominent inventor known for his contributions to the field of laser technologies. With a remarkable portfolio of 20 patents, he has made significant strides in the development of gas discharge laser systems, particularly focused on the precision and efficiency of laser output.

Latest Patents

Onkels’ latest patents showcase his innovative approach to laser technology. One of his notable inventions is a very narrow band, two-chamber, high repetition rate gas discharge laser system. This advanced oscillator-amplifier laser system comprises a first laser unit, including a discharge region filled with excimer or molecular fluorine lasing gas, and sophisticated components designed to optimize laser performance.

Another exceptional patent details an injection seeded modular gas discharge laser system capable of generating high-quality pulsed laser beams at remarkable pulse rates of 4,000 Hz or greater, with pulse energies of at least 5 mJ. This system, designed with two separate discharge chambers, allows for independent optimization of wavelength parameters in the master oscillator and pulse energy parameters in the amplifying chamber. The efficient design emphasizes operation speed and quality, particularly suitable for integrated circuit lithography applications.

Career Highlights

Eckehard D Onkels is a key inventor at Cymer, Inc., a company renowned for its pioneering work in laser technology for the semiconductor industry. His expertise and innovative spirit have greatly contributed to the company’s advancement in high-performance laser systems.

Collaborations

Throughout his career, Onkels has collaborated with distinguished colleagues, including William N Partlo and Alexander Igorevich Ershov. Together, they have worked on groundbreaking technologies that push the boundaries of what is possible in laser systems.

Conclusion

Eckehard D Onkels stands out as a significant figure in the field of gas discharge laser technology. His inventive spirit and dedication to advancing laser systems continue to influence various applications, affirming his status as a leading innovator. As technology evolves, his contributions remain integral to the future of laser applications in many industries.

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