This inventor holds 2 USPTO granted patents and 1 EPO patent. Top assignee: Cymer, Inc.. Active years: 2001-2002.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001-2002
Title: Innovations of Dmitri V Gaidarenko
Introduction
Dmitri V Gaidarenko is a notable inventor based in Poway, California. He has made significant contributions to the field of gas discharge lasers, holding a total of 2 patents. His work focuses on enhancing the performance and longevity of laser systems.
Latest Patents
Gaidarenko's latest patents include innovative designs aimed at improving gas discharge lasers. One of his patents, titled "Gas discharge laser long life electrodes," describes a laser chamber with two elongated erodable electrode elements. These elements are designed to minimize turbulence in the discharge region while allowing for gradual erosion over more than 8 billion pulses. The system includes a pulse power mechanism that delivers electrical pulses of at least 2J at rates of at least 2 KHz, along with a blower that circulates laser gas at speeds of at least 2 m/s. Additionally, a heat exchanger is incorporated to manage the heat generated by the blower and discharges.
Another significant patent is "Electric discharge laser with acoustic chirp correction." This invention addresses the issue of wavelength chirp in high pulse rate gas discharge lithography lasers. Gaidarenko identifies pressure waves from discharges as a major cause of this problem. His solution involves structural changes within the laser chamber to moderate these pressure waves and maintain a consistent laser gas temperature, thereby reducing variations in the index of refraction and improving beam direction stability.
Career Highlights
Dmitri Gaidarenko is currently employed at Cymer, Inc., where he continues to develop advanced laser technologies. His expertise in gas discharge lasers has positioned him as a key figure in the field.
Collaborations
Throughout his career, Gaidarenko has collaborated with notable colleagues, including Igor Vladimirovich Fomenkov and Jean-Marc Hueber. These partnerships have contributed to the advancement of laser technology and innovation.
Conclusion
Dmitri V Gaidarenko's contributions to gas discharge laser technology demonstrate his commitment to innovation and excellence in the field. His patents reflect a deep understanding of the challenges faced in laser systems and provide effective solutions to enhance their performance.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
