Location History:
- El Cajon, CA (US) (2000)
- Ramona, CA (US) (2002 - 2005)
Company Filing History:
Years Active: 2000-2005
Title: Innovator Spotlight: Robert A Shannon - Pioneering Gas Discharge Laser Systems
Introduction:
Robert A Shannon, a visionary inventor based in El Cajon, CA, has left an indelible mark on the field of gas discharge laser technology. With a remarkable portfolio of 9 patents to his name, Shannon's contributions have revolutionized laser systems used in integrated circuit lithography and beyond.
Latest Patents:
Shannon's groundbreaking innovation includes the development of gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates between 6,000 to 10,000 pulses per second. These improvements ensure precise target voltages, enhanced pulse energy monitoring, and effective debris removal between laser electrodes. His meticulous approach to refining the discharge region width and optimizing gas flow rates showcases his dedication to pushing the boundaries of laser technology.
Career Highlights:
Robert A Shannon is a key figure at Cymer, Inc., a leading company in the laser technology industry. His expertise and ingenuity have played a pivotal role in advancing the capabilities of gas discharge laser systems for various applications, particularly in the realm of integrated circuit lithography. Shannon's commitment to excellence and innovation has solidified his reputation as a trailblazer in the field.
Collaborations:
Throughout his career, Shannon has collaborated closely with esteemed colleagues such as Richard C Ujazdowski and Thomas Hofmann. Their collective efforts have led to the successful realization of cutting-edge gas discharge laser systems and have fostered a culture of innovation within the industry.
Conclusion:
In conclusion, Robert A Shannon's innovative spirit and technical prowess have positioned him as a driving force behind the evolution of gas discharge laser technology. His relentless pursuit of excellence and commitment to pushing the boundaries of what is possible continue to inspire the next generation of inventors and engineers in the field. Shannon's impact is not only felt in the patents he holds but also in the transformative influence he has had on the landscape of laser technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.