The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2000
Filed:
May. 12, 1999
Richard C Ujazdowski, San Diego, CA (US);
Robert A Shannon, El Cajon, CA (US);
Dmitry Berger, San Diego, CA (US);
William N Partlo, Poway, CA (US);
Tom A Watson, Carlsbad, CA (US);
Paul S Thompson, San Diego, CA (US);
Toshihiko Ishihara, San Diego, CA (US);
Carl E Tedesco, II, Del Mar, CA (US);
Donald G Larson, San Diego, CA (US);
Steven M Harrington, Cardiff, CA (US);
Richard G Morton, San Diego, CA (US);
James H Azzola, San Diego, CA (US);
I Roger Oliver, San Diego, CA (US);
Thomas P Duffey, San Diego, CA (US);
Igor V Fomenkov, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.