The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Oct. 10, 2007
William N. Partlo, Poway, CA (US);
Alexander I. Ershov, San Diego, CA (US);
German Rylov, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Christian J. Wittak, San Diego, CA (US);
Rajasekhar M. Rao, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
John Fitzgerald, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Vladimir B. Fleurov, Escondido, CA (US);
Robert N. Jacques, San Diego, CA (US);
Ed Danielewicz, Carlsbad, CA (US);
Robin Swain, Trabuco Canyon, CA (US);
Edward Arriola, Huntington Beach, CA (US);
Michael Wyatt, Santa Margarita, CA (US);
Walter Crosby, Los Alamitos, CA (US);
William N. Partlo, Poway, CA (US);
Alexander I. Ershov, San Diego, CA (US);
German Rylov, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Christian J. Wittak, San Diego, CA (US);
Rajasekhar M. Rao, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
John Fitzgerald, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Vladimir B. Fleurov, Escondido, CA (US);
Robert N. Jacques, San Diego, CA (US);
Ed Danielewicz, Carlsbad, CA (US);
Robin Swain, Trabuco Canyon, CA (US);
Edward Arriola, Huntington Beach, CA (US);
Michael Wyatt, Santa Margarita, CA (US);
Walter Crosby, Los Alamitos, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An apparatus and method which may comprise a pulsed gas discharge laser which may comprise a seed laser portion; an amplifier portion receiving the seed laser output and amplifying the optical intensity of each seed pulse; a pulse stretcher which may comprise: a first beam splitter operatively connected with the first delay path and a second pulse stretcher operatively connected with the second delay path; a first optical delay path tower containing the first beam splitter; a second optical delay path tower containing the second beam splitter; one of the first and second optical delay paths may comprise: a plurality of mirrors defining the respective optical delay path including mirrors located in the first tower and in the second tower; the other of the first and second optical delay paths may comprise: a plurality of mirrors defining the respective optical delay path including mirrors only in one of the first tower and the second tower.