Edward Arriola

Title: Edward Arriola: Innovator in Immersion Lithography Technology

Introduction

Edward Arriola is a notable inventor based in Huntington Beach, California. He has made significant contributions to the field of lithography, particularly through his innovative patent related to laser technology. His work is instrumental in advancing the capabilities of immersion lithography systems.

Latest Patents

Arriola holds a patent for an "Immersion lithography laser light source with pulse stretcher." This invention encompasses an apparatus and method that may include a pulsed gas discharge laser, which consists of a seed laser portion and an amplifier portion. The amplifier receives the seed laser output and amplifies the optical intensity of each seed pulse. The patent also describes a pulse stretcher that features a first beam splitter connected to a first delay path and a second pulse stretcher linked to a second delay path. The design includes optical delay path towers containing beam splitters and mirrors, which are essential for defining the respective optical delay paths.

Career Highlights

Edward Arriola is currently employed at Cymer, Inc., a company renowned for its advancements in photolithography technology. His role at Cymer has allowed him to work on cutting-edge projects that push the boundaries of laser technology in the semiconductor industry.

Collaborations

Throughout his career, Arriola has collaborated with esteemed colleagues, including William N Partlo and Alexander Igorevich Ershov. These collaborations have contributed to the development of innovative solutions in the field of lithography.

Conclusion

Edward Arriola's contributions to immersion lithography technology through his patent and work at Cymer, Inc. highlight his role as a key innovator in the industry. His advancements continue to influence the future of semiconductor manufacturing.