The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Apr. 15, 2011
Alexander N. Bykanov, San Diego, CA (US);
Silvia DE Dea, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Vladimir B. Fleurov, Escondido, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Alexander N. Bykanov, San Diego, CA (US);
Silvia De Dea, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Vladimir B. Fleurov, Escondido, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
An extreme-ultraviolet (EUV) light source is described herein comprising an optic; a primary EUV light radiator generating an EUV light emitting plasma and producing a deposit on said optic; and a cleaning system comprising a gas and a secondary light radiator, the secondary light radiator generating a laser produced plasma and producing a cleaning species with the gas.