Location History:
- Tosu, JP (2009)
- Kumamoto, JP (2017 - 2021)
- Koshi, JP (2016 - 2022)
Company Filing History:
Years Active: 2009-2025
Title: The Innovative Contributions of Tsukasa Hirayama
Introduction
Tsukasa Hirayama is a prominent inventor based in Koshi, Japan, known for his significant contributions to substrate processing technologies. With a total of eight patents to his name, Hirayama has made a notable impact in the field of semiconductor manufacturing.
Latest Patents
Hirayama's latest patents include a substrate processing method and a substrate liquid treatment apparatus. The substrate processing method involves several steps, including providing a substrate with an etching target film and a mask, forming a first layer containing nitrogen and hydrogen atoms, modifying this layer with a halogen-containing gas, and etching the recess using a third processing gas. The substrate liquid treatment apparatus features an inner tank for storing treatment liquid, an outer tank, and a movable lid that ensures effective splash protection while maintaining accessibility to the inner tank.
Career Highlights
Hirayama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work focuses on developing advanced technologies that enhance the efficiency and effectiveness of substrate processing.
Collaborations
Throughout his career, Hirayama has collaborated with notable colleagues, including Takao Inada and Hiroshi Tanaka, contributing to various innovative projects and advancements in their field.
Conclusion
Tsukasa Hirayama's inventive spirit and dedication to advancing substrate processing technologies have established him as a key figure in the semiconductor industry. His patents reflect a commitment to innovation that continues to shape the future of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.